Skip to menu

XEDITION

SM245 MUX 1 V2

Optical Emission Spectroscopy

SM-245-MUX-1-V2

 

Product Details

- Low Noise compact CCD based OES system

- High-speed Data Acquisition

- Enhanced Dark Current Noise

- Compact & Modular Design

- Low Dark current noise and stray light for spectro-photometer & spectro-radiometer grade

 

Application Details

 

For more information, or if you have any other questions pertaining to the system, please contact us here.

 

OES Overview

Diagnosis of process conditions and anomaly detection are possible through optical spectrum analysis emitted from CVD and dry etching plasma chambers of semiconductor display processes. Our Optical Emission Spectroscopy (OES) system is a multi-channel OES system for real-time monitoring with real-time optical spectrum data acquisition and transmission of customized analysis data based on TCP / IP Interface, on-line facility condition monitoring and process condition diagnosis.

 
 
OES Sensor Specifications (SM245*)

Spectral Range

200-850nm
Pixel Number 2048 (effective)
Spectral Resolution 0.3 ~ 10nm FWHM (User Selectable Manufacturing)
Wavelength Accuracy Less than ±0.3nm
Computer Interface USB 1.1 / 2.0 Controller
Dark Noise RMS Less than 35 RMS counts @ 35ms
Minimum Exposure Time 1 ms
SNR More than 250 : 1
Stray Light Level Less than 0.1% avg.
ADC Resolution 16-bit (0 ~ 65535 counts)
Dimensions   3.54 x 2.76 x 1.73 inches (90 x 70 x 44mm)

 

Controller Specification (SM-MUX-V2)

Interface Rendezvous for TC (FDC) Communication with FabGuardTM Customized NON-SECS Protocol*
OES Multi-channel 4 channels maximum
Type Horizontal Type
OS Microsoft Windows
Software SM32ProMX_RV v1.0
Dimensions 11.42 x 10.24 x 3.54 inches (290 x 260 x 90mm)

* SVID Status: SVID List and Real-time transmission value monitoring

* RV Log: Real-time RV Communication Log Recording

* RV setting

* Software: SM32ProMX_RV v1.0

 

Optical Fiber Specification (AF0400-SMSM-U50S-NS-Metal)

Core Size 400um fused silica core
Transmission Range 200 ~ 110nm Non-solarizing Option for Deep UV
Total Length 5 meters
Connector SMA905
Jacket Type Metal Armored (OD ~ 3mm)

 

Up