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SM303 MUX 1 V2

Optical Emission Spectroscopy

 

SM-303-MUX-1-V2

 

Product Details

- High performance TE-cooled backthinned CCD based OES system

- High-speed Data Acquisition

- High Signal to Noise Ratio

- High UV Quantum Efficiency

- Low Dark current noise and stray light for spectro-photometer & spectro-radiometer grade

 

Application Details

 

For more information, or if you have any other questions pertaining to the system, please contact us here.

 

OES Overview

Diagnosis of process conditions and anomaly detection are possible through optical spectrum analysis emitted from CVD and dry etching plasma chambers of semiconductor display processes. Our Optical Emission Spectroscopy (OES) system is a multi-channel OES system for real-time monitoring with real-time optical spectrum data acquisition and transmission of customized analysis data based on TCP / IP Interface, on-line facility condition monitoring and process condition diagnosis.

 
 
OES Sensor Specifications (SM303*)

Spectral Range

200-850nm
Pixel Number 1024 x 58 (effective)
Spectral Resolution 0.3 ~ 7nm FWHM (User Selectable Manufacturing)
Wavelength Accuracy Less than ±0.3nm
Computer Interface USB 1.1 / 2.0 Controller
Dark Noise RMS TYP > 2 @ minimum Integration time
Minimum Exposure Time 7 ms
SNR 1000 : 1
Stray Light Level Less than 0.05% avg, < 0.01% @ 632nm
ADC Resolution 16-bit (0 ~ 65535 counts)
Dimensions  6.81 x 4.72 x 3.14 inches (173 x 120 x 79.8mm)

 

Controller Specification (SM-MUX-V2)

Interface Rendezvous for TC (FDC) Communication with FabGuardTM Customized NON-SECS Protocol*
OES Multi-channel 4 channels maximum
Type Horizontal Type
OS Microsoft Windows
Software SM32ProMX_RV v1.0
Dimensions 11.42 x 10.24 x 3.54 inches (290 x 260 x 90mm)

* SVID Status: SVID List and Real-time transmission value monitoring

* RV Log: Real-time RV Communication Log Recording

* RV setting

* Software: SM32ProMX_RV v1.0

 

Optical Fiber Specification (AF0400-SMSM-U50S-NS-Metal)

Core Size 400um fused silica core
Transmission Range 200 ~ 110nm Non-solarizing Option for Deep UV
Total Length 5 meters
Connector SMA905
Jacket Type Metal Armored (OD ~ 3mm)

 

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